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金属蒸发

¥1,500.00

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分类：前道晶圆制造

描述

描述

技术指标

晶圆尺寸: 2, 4, 6英寸晶圆
蒸发金属种类：Ti、Al、Cu、Ni、Au、Cr、Pt等
片内均一性（1 sigma）：≤3%
Wafer to Wafer均一性（1 sigma）：≤3%
蒸发速率：0.1A/s-20A/s可调