步进式光刻系统
¥1,500.00
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Description
技术指标
- 晶圆尺寸: 6英寸
- 曝光强度: 600mw/cm²
- 分辨率: 0.6μm
- 套刻精度: ±0.08μm
- 照明均匀性: ±2%
- 最大曝光面积: 17.5mmX17.5mm
¥1,500.00
Free shipping on orders over $50!
技术指标
