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接触式光刻系统

¥1,500.00

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分类：前道晶圆制造

描述

描述

技术指标

晶圆尺寸: 2, 4, 6英寸晶圆及碎片光刻
分辨率: 1.5μm
正面套刻精度: ±0.5μm
照明均匀性: ±3%