金属等离子体刻蚀RIE

¥1,500.00

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Description

技术指标

  • 晶圆尺寸: 6英寸
  • 可刻蚀材料：Al、W、Mo等
  • 片内均一性：≤5%
  • 刻蚀速率：＞3500A/min

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